{"id":1285,"date":"2026-10-16T09:11:39","date_gmt":"2026-10-16T01:11:39","guid":{"rendered":"http:\/\/nowa1008.web.site808.cn\/?post_type=support&#038;p=1285"},"modified":"2026-10-16T09:15:10","modified_gmt":"2026-10-16T01:15:10","slug":"plasma-cleaning-process-parameters","status":"publish","type":"support","link":"https:\/\/www.nowasemi.com\/zh\/support\/plasma-cleaning-process-parameters\/","title":{"rendered":"\u7b49\u79bb\u5b50\u6e05\u6d17\u5de5\u827a\u53c2\u6570"},"content":{"rendered":"<h2>\u7b49\u79bb\u5b50\u6e05\u6d17\u5de5\u827a\u53c2\u6570<\/h2>\n<p>Power, pressure, gas flow, treatment time, and chamber geometry determine cleaning rate and surface impact. These settings should be developed as a connected process window rather than adjusted independently.<\/p>\n<h3 class=\"mt30\">\u5173\u952e\u8003\u8651\u56e0\u7d20<\/h3>\n<ul>\n<li>\u5728\u52a0\u5de5\u524d\u786e\u8ba4\u6750\u6599\u517c\u5bb9\u6027\u3001\u8bbe\u5907\u72b6\u51b5\u548c\u9a8c\u6536\u6807\u51c6\u3002.<\/li>\n<li>\u63a7\u5236\u5173\u952e\u53c2\u6570\uff0c\u5e76\u8bb0\u5f55\u6bcf\u6279\u5408\u683c\u4ea7\u54c1\u6216\u751f\u4ea7\u6279\u6b21\u7684\u53ef\u8ffd\u6eaf\u6570\u636e\u3002.<\/li>\n<li>\u5229\u7528\u68c0\u6d4b\u548c\u6027\u80fd\u7ed3\u679c\uff0c\u533a\u5206\u6b63\u5e38\u53d8\u5316\u4e0e\u6b63\u5728\u53d1\u751f\u7684\u5de5\u827a\u95ee\u9898\u3002.<\/li>\n<\/ul>\n<h3 class=\"mt30\">\u63a8\u8350\u7684\u65b9\u6cd5<\/h3>\n<p>\u4ece\u5df2\u8bb0\u5f55\u7684\u57fa\u7840\u6570\u636e\u5f00\u59cb\uff0c\u5e76\u4e00\u6b21\u6027\u6539\u53d8\u4e00\u4e2a\u660e\u786e\u7684\u56e0\u7d20\u3002\u8fd0\u884c\u4ee3\u8868\u6027\u6837\u672c\uff0c\u4e0e\u534f\u8bae\u89c4\u8303\u8fdb\u884c\u5bf9\u6bd4\uff0c\u5e76\u9a8c\u8bc1\u6539\u8fdb\u7ed3\u679c\u662f\u5426\u5728\u4e0d\u540c\u5730\u70b9\u3001\u64cd\u4f5c\u5458\u548c\u7269\u6599\u6279\u6b21\u4e2d\u4fdd\u6301\u7a33\u5b9a\u3002\u9884\u9632\u6027\u7ef4\u62a4\u548c\u5b9a\u671f\u6821\u51c6\u5e94\u8be5\u652f\u6301\u8fd9\u4e00\u8fc7\u7a0b\uff0c\u800c\u4e0d\u662f\u5f25\u8865\u4e0d\u7a33\u5b9a\u914d\u65b9\u7684\u4e0d\u8db3\u3002.<\/p>\n<h3 class=\"mt30\">\u7ed3\u8bba<\/h3>\n<p>Plasma Cleaning Process Parameters should be managed through clear specifications, controlled trials, and ongoing trend review. This approach improves repeatability, supports faster troubleshooting, and reduces the risk of hidden reliability issues in semiconductor manufacturing.<\/p>","protected":false},"featured_media":0,"template":"","meta":{"_acf_changed":false},"support_cat":[70],"class_list":["post-1285","support","type-support","status-publish","hentry","support_cat-plasma-cleaning-principles"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.nowasemi.com\/zh\/wp-json\/wp\/v2\/support\/1285","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.nowasemi.com\/zh\/wp-json\/wp\/v2\/support"}],"about":[{"href":"https:\/\/www.nowasemi.com\/zh\/wp-json\/wp\/v2\/types\/support"}],"wp:attachment":[{"href":"https:\/\/www.nowasemi.com\/zh\/wp-json\/wp\/v2\/media?parent=1285"}],"wp:term":[{"taxonomy":"support_cat","embeddable":true,"href":"https:\/\/www.nowasemi.com\/zh\/wp-json\/wp\/v2\/support_cat?post=1285"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}