{"id":1286,"date":"2026-10-16T09:11:45","date_gmt":"2026-10-16T01:11:45","guid":{"rendered":"http:\/\/nowa1008.web.site808.cn\/?post_type=support&#038;p=1286"},"modified":"2026-10-16T09:15:14","modified_gmt":"2026-10-16T01:15:14","slug":"choosing-gases-for-plasma-cleaning","status":"publish","type":"support","link":"https:\/\/www.nowasemi.com\/zh\/support\/choosing-gases-for-plasma-cleaning\/","title":{"rendered":"Choosing Gases for Plasma Cleaning"},"content":{"rendered":"<h2>Choosing Gases for Plasma Cleaning<\/h2>\n<p>Oxygen, argon, nitrogen, hydrogen-containing blends, and fluorine chemistry produce different reactions. Gas choice depends on the contamination, substrate, downstream process, and safety requirements.<\/p>\n<h3 class=\"mt30\">\u5173\u952e\u8003\u8651\u56e0\u7d20<\/h3>\n<ul>\n<li>\u5728\u52a0\u5de5\u524d\u786e\u8ba4\u6750\u6599\u517c\u5bb9\u6027\u3001\u8bbe\u5907\u72b6\u51b5\u548c\u9a8c\u6536\u6807\u51c6\u3002.<\/li>\n<li>\u63a7\u5236\u5173\u952e\u53c2\u6570\uff0c\u5e76\u8bb0\u5f55\u6bcf\u6279\u5408\u683c\u4ea7\u54c1\u6216\u751f\u4ea7\u6279\u6b21\u7684\u53ef\u8ffd\u6eaf\u6570\u636e\u3002.<\/li>\n<li>\u5229\u7528\u68c0\u6d4b\u548c\u6027\u80fd\u7ed3\u679c\uff0c\u533a\u5206\u6b63\u5e38\u53d8\u5316\u4e0e\u6b63\u5728\u53d1\u751f\u7684\u5de5\u827a\u95ee\u9898\u3002.<\/li>\n<\/ul>\n<h3 class=\"mt30\">\u63a8\u8350\u7684\u65b9\u6cd5<\/h3>\n<p>\u4ece\u5df2\u8bb0\u5f55\u7684\u57fa\u7840\u6570\u636e\u5f00\u59cb\uff0c\u5e76\u4e00\u6b21\u6027\u6539\u53d8\u4e00\u4e2a\u660e\u786e\u7684\u56e0\u7d20\u3002\u8fd0\u884c\u4ee3\u8868\u6027\u6837\u672c\uff0c\u4e0e\u534f\u8bae\u89c4\u8303\u8fdb\u884c\u5bf9\u6bd4\uff0c\u5e76\u9a8c\u8bc1\u6539\u8fdb\u7ed3\u679c\u662f\u5426\u5728\u4e0d\u540c\u5730\u70b9\u3001\u64cd\u4f5c\u5458\u548c\u7269\u6599\u6279\u6b21\u4e2d\u4fdd\u6301\u7a33\u5b9a\u3002\u9884\u9632\u6027\u7ef4\u62a4\u548c\u5b9a\u671f\u6821\u51c6\u5e94\u8be5\u652f\u6301\u8fd9\u4e00\u8fc7\u7a0b\uff0c\u800c\u4e0d\u662f\u5f25\u8865\u4e0d\u7a33\u5b9a\u914d\u65b9\u7684\u4e0d\u8db3\u3002.<\/p>\n<h3 class=\"mt30\">\u7ed3\u8bba<\/h3>\n<p>Choosing Gases for Plasma Cleaning should be managed through clear specifications, controlled trials, and ongoing trend review. This approach improves repeatability, supports faster troubleshooting, and reduces the risk of hidden reliability issues in semiconductor manufacturing.<\/p>","protected":false},"featured_media":0,"template":"","meta":{"_acf_changed":false},"support_cat":[70],"class_list":["post-1286","support","type-support","status-publish","hentry","support_cat-plasma-cleaning-principles"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.nowasemi.com\/zh\/wp-json\/wp\/v2\/support\/1286","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.nowasemi.com\/zh\/wp-json\/wp\/v2\/support"}],"about":[{"href":"https:\/\/www.nowasemi.com\/zh\/wp-json\/wp\/v2\/types\/support"}],"wp:attachment":[{"href":"https:\/\/www.nowasemi.com\/zh\/wp-json\/wp\/v2\/media?parent=1286"}],"wp:term":[{"taxonomy":"support_cat","embeddable":true,"href":"https:\/\/www.nowasemi.com\/zh\/wp-json\/wp\/v2\/support_cat?post=1286"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}