{"id":1318,"date":"2026-10-16T09:35:42","date_gmt":"2026-10-16T01:35:42","guid":{"rendered":"http:\/\/nowa1008.web.site808.cn\/?post_type=support&#038;p=1318"},"modified":"2026-10-16T09:35:42","modified_gmt":"2026-10-16T01:35:42","slug":"plasma-process-setup-and-qualification-checklist","status":"publish","type":"support","link":"https:\/\/www.nowasemi.com\/zh\/support\/plasma-process-setup-and-qualification-checklist\/","title":{"rendered":"\u7b49\u79bb\u5b50\u4f53\u5de5\u827a\u8bbe\u7f6e\u548c\u8d44\u683c\u8ba4\u8bc1\u6e05\u5355"},"content":{"rendered":"<h2>\u7b49\u79bb\u5b50\u4f53\u5de5\u827a\u8bbe\u7f6e\u548c\u8d44\u683c\u8ba4\u8bc1\u6e05\u5355<\/h2>\n<p>\u7b49\u79bb\u5b50\u5de5\u827a\u5e94\u8be5\u88ab\u89c6\u4e3a\u4e00\u4e2a\u5b8c\u6574\u7684\u7cfb\u7edf\uff0c\u5176\u4e2d\u5305\u62ec\u6c14\u4f53\u5316\u5b66\u3001\u52a8\u529b\u3001\u538b\u529b\u3001\u6d41\u91cf\u3001\u5904\u7406\u65f6\u95f4\u3001\u8154\u5ba4\u6761\u4ef6\u3001\u56fa\u5b9a\u88c5\u7f6e\u8bbe\u8ba1\u4ee5\u53ca\u4ea7\u54c1\u88c5\u8f7d\u3002\u76ee\u6807\u53ef\u80fd\u5305\u62ec\u6e05\u6d17\u3001\u6fc0\u6d3b\u3001\u8680\u523b\u6216\u8fd9\u4e9b\u6548\u679c\u7684\u7ec4\u5408\u3002.<\/p>\n<h3 class=\"mt30\">\u51c6\u5907\u5de5\u4f5c<\/h3>\n<p>\u5728\u5f00\u59cb\u64cd\u4f5c\u4e4b\u524d\uff0c\u8bf7\u4ed4\u7ec6\u67e5\u770b\u4ea7\u54c1\u56fe\u7eb8\u3001\u6750\u6599\u89c4\u683c\u3001\u8bbe\u5907\u6027\u80fd\u4ee5\u53ca\u9a8c\u6536\u6807\u51c6\u3002\u8bf7\u786e\u4fdd\u6d4b\u91cf\u5de5\u5177\u5df2\u6821\u51c6\uff0c\u6240\u9009\u6837\u54c1\u4ee3\u8868\u4e86\u6b63\u5e38\u751f\u4ea7\u6761\u4ef6\u3002.<\/p>\n<h3 class=\"mt30\">\u5173\u952e\u6280\u672f\u68c0\u67e5<\/h3>\n<ul>\n<li>\u8bb0\u5f55\u57fa\u6750\u3001\u6c61\u67d3\u7c7b\u578b\u3001\u4e0b\u6e38\u5de5\u827a\u4ee5\u53ca\u53ef\u8861\u91cf\u7684\u5904\u7406\u76ee\u6807\u3002.<\/li>\n<li>\u5728\u4ee3\u8868\u6027\u8d1f\u8f7d\u4e0b\u5747\u5300\u5730\u5904\u7406\u5730\u56fe\uff0c\u5e76\u9a8c\u8bc1\u654f\u611f\u6750\u6599\u4e0d\u4f1a\u53d7\u5230\u635f\u574f\u3002.<\/li>\n<li>\u4f7f\u7528\u5b9a\u4e49\u7684\u63a7\u5236\u9650\u5ea6\u76d1\u6d4b\u63a5\u89e6\u89d2\u3001\u7c98\u9644\u529b\u3001\u6b8b\u7559\u7269\u53bb\u9664\u60c5\u51b5\u4ee5\u53ca\u8154\u5ba4\u72b6\u51b5\u3002.<\/li>\n<\/ul>\n<h3 class=\"mt30\">\u9a8c\u8bc1\u4e0e\u6587\u4ef6\u8bb0\u5f55<\/h3>\n<p>\u8bb0\u5f55\u57fa\u51c6\u3001\u53d8\u5316\u53d8\u91cf\u3001\u68c0\u6d4b\u7ed3\u679c\u548c\u6700\u7ec8\u8bbe\u7f6e\u3002\u53ea\u6709\u5728\u91cd\u590d\u6027\u7b26\u5408\u534f\u8bae\u6807\u51c6\u540e\uff0c\u624d\u80fd\u505c\u6b62\u8be5\u8fc7\u7a0b\u3002\u4fdd\u6301\u5408\u683c\u7684\u8bbe\u7f6e\u3001\u7ef4\u62a4\u8981\u6c42\u548c\u54cd\u5e94\u8ba1\u5212\uff0c\u4ee5\u4fbf\u64cd\u4f5c\u4eba\u5458\u968f\u65f6\u638c\u63e1\uff0c\u4ee5\u4fbf\u5feb\u901f\u53d1\u73b0\u548c\u7ea0\u6b63\u672a\u6765\u51fa\u73b0\u7684\u4e0d\u5408\u683c\u60c5\u51b5\u3002.<\/p>","protected":false},"featured_media":0,"template":"","meta":{"_acf_changed":false},"support_cat":[63],"class_list":["post-1318","support","type-support","status-publish","hentry","support_cat-technical-documents"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.nowasemi.com\/zh\/wp-json\/wp\/v2\/support\/1318","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.nowasemi.com\/zh\/wp-json\/wp\/v2\/support"}],"about":[{"href":"https:\/\/www.nowasemi.com\/zh\/wp-json\/wp\/v2\/types\/support"}],"wp:attachment":[{"href":"https:\/\/www.nowasemi.com\/zh\/wp-json\/wp\/v2\/media?parent=1318"}],"wp:term":[{"taxonomy":"support_cat","embeddable":true,"href":"https:\/\/www.nowasemi.com\/zh\/wp-json\/wp\/v2\/support_cat?post=1318"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}