クローズドループ最適化によりウェハーディシング品質が向上

Closed-loop process improvement combines dicing results with equipment settings and blade-condition data. Engineers can use measured chipping, kerf width, spindle load, and cut consistency to refine recipes and maintain stable performance across wafer lots.

Key developments

• Automated inspection provides consistent measurements for front-side and backside chipping.
• Recipe adjustments can be evaluated against cut quality, throughput, and blade wear together.
• Traceable data supports faster qualification when materials or product designs change.

Practical value for manufacturers

These capabilities help production teams make decisions with clearer evidence, shorten the time needed to investigate deviations, and maintain stable output as product requirements change. Effective implementation combines suitable equipment, controlled processes, useful data, and clear responsibility for follow-up.

NOWA’s approach

NOWA works with customers to review the application, identify the most valuable improvement opportunity, and define a practical verification plan. The goal is to introduce automation and AI vision in a way that supports measurable quality, efficiency, and reliability improvements on the production floor.