Polymers often need activation without excessive etching, while metals may require oxide or organic removal. Recipe selection should reflect the surface chemistry and the next adhesive, coating, or bonding step.
Under-cleaning, over-etching, poor uniformity, redeposition, and surface damage usually point to an unstable recipe, chamber condition, loading pattern, or material mismatch.
Oxygen, argon, nitrogen, hydrogen-containing blends, and fluorine chemistry produce different reactions. Gas choice depends on the contamination, substrate, downstream process, and safety requirements.
Power, pressure, gas flow, treatment time, and chamber geometry determine cleaning rate and surface impact. These settings should be developed as a connected process window rather than adjusted independently.